Increase your productivity and
performance.
Take advantage of G5+ for
high-performance and low-cost
GaN-on-Si devices:
■ Dedicated technology package for GaN
on 200 mm Si
■ Compatible with the AIX G5 HT platform
■ Enables Si-style mass manufacturing
including chamber reset
■ Planetary Reactor® Technology
- Excellent and symmetric uniformities
- Controlled bow behavior
- Using standard Si substrates

AIX G5 Series GaN on Si
characteristics
Unique axis symmetric wafer
performance like Si single wafer
reactor
- Wafer bow
- Thickness, composition,
concentration
- Device yield
Warm ceiling results in lowest heat
flux through wafer
- smallest wafer bow by vertical
temperature gradient
- Enabling standard Si wafer
thickness
In-situ temperature profile
tweaking by individual GFR control
Customized temperature
optimization by recess shaping